10 kPa On-Chip TemperatureCompensated and CalibratedSilicon Pressure Sensors

The MPX2010 series silicon piezoresistive pressure sensors provide a veryaccurate and linear voltage output directly proportional to the applied pressure.These sensors house a single monolithic silicon die with the strain gauge andthin film resistor network integrated. The sensor is laser trimmed for precisespan, offset calibration and temperature compensation.