Integrated Silicon Pressure SensorOn-Chip Signal Conditioned,Temperature Compensated andCalibrated

The MPxx5010 series piezoresistive transducers are state-of-the-artmonolithic silicon pressure sensors designed for a wide range of applications,but particularly those employing a microcontroller or microprocessor with A/Dinputs. This transducer combines advanced micromachining techniques,thin-film metallization, and bipolar processing to provide an accurate, highlevel analog output signal that is proportional to the applied pressure. Theaxial port has been modified to accommodate industrial grade tubing.