Integrated Silicon Pressure SensorOn-Chip Signal Conditioned,Temperature Compensated, andCalibrated

The MPX5100 series piezoresistive transducer is a state-of-the-art monolithicsilicon pressure sensor designed for a wide range of applications, but particularlythose employing a microcontroller or microprocessor with A/D inputs. Thispatented, single element transducer combines advanced micromachiningtechniques, thin-film metallization, and bipolar processing to provide an accurate,high level analog output signal that is proportional to the applied pressure.