50 kPa On-Chip TemperatureCompensated and CalibratedSilicon Pressure Sensors
The MPX2053 series devices are silicon piezoresistive pressure sensorsthat provide a highly accurate and linear voltage output directly proportional to theapplied pressure. A single, monolithic silicon diaphragm with the strain gauge andan integrated thin-film resistor network. Precise span and offset calibration withtemperature compensation are achieved by laser trimming