Media Resistant andHigh Temperature AccuracyIntegrated Silicon Pressure Sensorfor Measuring Absolute Pressure,On-Chip Signal Conditioned,Temperature Compensatedand Calibrated

The Freescale MPXHZ6400A series sensor integrates on-chip, bipolar opamp circuitry and thin film resistor networks to provide a high output signal andtemperature compensation. The small form factor and high reliability of on-chipintegration make the Freescale pressure sensor a logical and economical choicefor the system designer.The MPXHZ6400A series piezoresistive transducer is a state-of-the-art,monolithic, signal conditioned, silicon pressure sensor. This sensor combinesadvanced micromachining techniques, thin film metallization, and bipolarsemiconductor processing to provide an accurate, high level analog output signalthat is proportional to applied pressure.