MPXxx6115A, 15 to 115 kPa, Absolute,Integrated Pressure Sensor
The MPXxx6115A series sensor integrates on-chip, bipolar op amp circuitry andthin film resistor networks to provide a high output signal and temperaturecompensation. The small form factor and high reliability of on-chip integration makethe pressure sensor a logical and economical choice for the system designer.The MPXxx6115A series piezoresistive transducer is a state-of-the-art, monolithic,signal conditioned, silicon pressure sensor. This sensor combines advancedmicromachining techniques, thin film metallization, and bipolar semiconductorprocessing to provide an accurate, high level analog output signal that isproportional to applied pressure.